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Love Cleaning Machine×ソフエンジニアリング - メーカー・企業と製品の一覧

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Introducing the "Spin Scrub Cleaning Device Series" - High Quality and High Performance!

We will introduce the new model of the automatic scrub cleaning device for mass production, as well as the photo mask cleaning device with a cumulative total of over 200 units in the series.

《1》【W-Spin Scrub Automatic Processing Device】  ◆ This is the latest model of "automatic scrub cleaning device" for mass production.  ◆ It is a model focused on high throughput and high reliability.  ◆ Suitable for "cleaning after CMP or polishing," "incoming cleaning," "final cleaning," etc.!  ◆ It supports a variety of options such as "reverse function," "brush pressure setting function," "CO2 ionizer," and more.  ◆ Customization for various needs is also available. 《2》【Photo Mask Cleaning Device】  ◆ This device corresponds to a series based on mask size.  ◆ It is a long-selling model with over 200 units sold in total.  ◆ It has a rich track record with over 90% market share in domestic masks!  ◆ There are also many units in operation at various device manufacturers.  ◆ There are numerous successful cases for "removing resist that adhered during contact exposure" as well! * Please feel free to download the PDF materials or contact us for more information.

  • Other semiconductor manufacturing equipment

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